Please use this identifier to cite or link to this item: http://dr.iiserpune.ac.in:8080/xmlui/handle/123456789/8972
Title: From Pixels to Nanometers: Integrating Machine Learning and Mechatronics for Photolithography Automation with a Focus on 2D Materials
Authors: RAHMAN, ATIKUR
RAO, RAVI PRAKASH
Dept. of Physics
20181127
Keywords: 2D Materials
Photolithography
Bismuth Oxyselenide
Issue Date: May-2024
Citation: 61
Abstract: We have tried to optimize the growth parameters of the CVD growth of Bi2O2Se on various substrates, focusing on f-mica. Also, exploring the various techniques of Photolithography to signify the vital role it plays in 2D material research. Moreover, we have proposed and designed an Automated Maskless Photolithography setup by modifying the existing Photolithography setup with merely Stepper Motors, Raspberry Pi, Arduino, A camera and a DLP.
URI: http://dr.iiserpune.ac.in:8080/xmlui/handle/123456789/8972
Appears in Collections:MS THESES

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