Dey, R.M.; Deshpande S.K.; Singh S.B.; Chande, N.; Patil, D.S.; KULKARNI, S. K.
(Indian Academy of Sciences, 2013-03)
Diamond like carbon (DLC) coatings were deposited on silicon substrates by microwave electron cyclotron resonance (ECR) plasma CVD process using plasma of Ar and CH 4 gases under the influence of negative d.c. self bias ...